Enhancing Cybersecurity and Precision Inspection: Delta's Semiconductor Equipment Achieves SEMI E187 Certification

As digitization picks up pace in factories, the data security standards for semiconductor equipment are becoming more stringent. The SEMI association jointly set the SEMI E187 cybersecurity standards with Taiwan Semiconductor Manufacturing Company (TSMC), which became a key security threshold for equipment makers. Delta has taken the lead among industry competitors by using Software Bill of Materials (SBOM) scanning and vulnerability tracking to identify cybersecurity risks early. It has also implemented an application whitelisting mechanism to ensure information security during the operation of Wafer Edge Profile Measurement Equipment, thereby strengthening the digital protection of critical production information.

Navigating the Path to SEMI E187 Certification
Achieving the SEMI E187 certification is far from an easy task, as the team is faced with challenges such as complex software structures and long testing periods. Working closely with the cybersecurity experts from Delta Research Center, the R&D team for the Wafer Edge Profile Measurement Equipment successfully collected various cybersecurity specifications and network architecture data, and conducted benchmarking tests via remote computers. The certification procedure entails virus scanning, file categorization and security level assessment, showing Delta’s high commitment to building strong cybersecurity.

Smart & Secure: Cyber-Certified Equipment Enhances Data Confidence
Delta’s Wafer Edge Profile Measurement Equipment, now compliant with the SEMI E187 cybersecurity standard, enhances data security and system protection—ensuring measurement data is securely stored and tamper-proof. Its highly integrated, modular design delivers micrometer-scale precision, suitable for both standard silicon wafers and emerging third-generation semiconductors like silicon carbide (SiC). The system supports flexible expansion with roughness and edge defect AOI modules, offering a complete wafer inspection solution for quality monitoring. With SEMI E187’s standardized cybersecurity framework, the instrument integrates seamlessly into smart factories, securing data flow while boosting process stability and market competitiveness.

SEMI E187 Paves the Way for Cyber-Physical Integration
Cybersecurity certifications such as SEMI E187 act as a lifeguard for semiconductor equipment, which could accelerate digitization and cyber-physical integration. Amid the trend of low-volume large-variety production needs, Delta’s semiconductor equipment now integrates with its proprietary digital twin technology Virtual Machine Development Platform DIATwin, which enables rapid design, simulation, and commissioning of equipment to reduce the cost and time required for new product introductions. SEMI E187 cybersecurity certification ensures a more secure information transfer, establishing a robust cybersecurity shield.

Delta possesses a comprehensive range of semiconductor manufacturing equipment, covering processes from front-end fabrication to back-end packaging. This includes Wafer Profile Measurement Equipment, Wafer Sorters, IR Pinhole Inspection, Wafer Edge Grinders, and High-Speed Multi-Die Advanced Packaging equipment. Going forward, Delta will actively expand the certification of its semiconductor equipment under the SEMI E187 cybersecurity standard to further enhance its market competitiveness.