Challenge: Heating Delay in a Furnace
PID Cascade Control

The temperature controller DTDM supports PID cascade control, utilizing multiple temperature sensors to monitor the temperature within the furnace and the heater. By leveraging both outer and inner loops, it rapidly calculates the target temperature (SV) and the current temperature (PV), promptly outputting control commands. With the fast response and low latency features of the inner loop, it quickly eliminates interference within the system, achieving stable temperature control.

Challenge: Temperature Deviation
Temperature Linearization Table,

±0.1% Measurement Accuracy,

Sampling Period of 10ms

To address the nonlinear characteristics of temperature sensors, the temperature controller DTDM provides a linearization table feature with up to 14 temperature calibration points. This allows users to define calibration values for specific temperature points requiring compensation, using breakpoints or bias offsets tailored to the needs of on-site application. Additionally, the temperature controller DTDM supports ±0.1% measurement accuracy and a 10 ms sampling rate, enabling finer temperature monitoring to effectively prevent fluctuations in tube furnace temperature and ensuring precise temperature control.

Challenge: Uneven Heating in a Furnace
Modular Expansion

The temperature controller DTDM features a modular design, enabling equipment manufacturers to expand the temperature control system for increasingly large chemical vapor deposition (CVD) equipment. By using measurement expansion units and modules such as DI, DO, relays, and EtherCAT communication modules, the temperature control system can be extended to up to 32 PID control loops and 128 output channels, enabling comprehensive temperature monitoring and control.

Multi-Channel PV Comparison &

Alarm

The temperature controller DTDM supports multi-channel temperature comparison and alarms, allowing users to select specific channels for monitoring the reactor chamber or wafer temperature. When the temperature difference between these channels exceeds the preset threshold, the temperature controller DTDM will promptly issue an alarm and automatically execute predefined corrective actions, reducing the production of defective products.