RF Generator 1.5kW / 13.56MHz

1.5kW RF Generator

Delta's RF generators excel in diverse plasma processes, ensuring stability despite chamber impedance fluctuations. Their full digital control design provides high-resolution power output, meeting varied process control requirements. The generators feature pulse function selection to mitigate substrate charge buildup, minimize arcing, and boost process efficiency. Moreover, microsecond-level arc handling minimizes process damage effectively

Product Introduction

Features & Benefits
  • Optional pulse control, improved process flexibility
  • Microsecond-level arc management
  • Full digital control
  • High-resolution power output
  • High precision output to improve process reproducibility
Applications

Plasma

Sputtering

Semi

Display

Industry