15kW High-Current Series
Delta’s high-current DC power supply is tailored for semiconductor ion implantation, offering precise film tuning. It uses zero voltage switching and silicon carbide components for high energy efficiency. With over 0.95 power factor via active correction, it delivers up to 15kW output power. Featuring RS-232 and analog remote monitoring, it ensures precise operation with low ripple, minimal temperature variation, and robust safety features.