Straight DC Power Supply 20kW / 1200V

20kW Straight DC Power Supply

Delta's high-voltage DC power supply meets stringent sputtering system requirements and is validated in critical processes. It features an ultra-wide full-power operating impedance range for process variability. With excellent power control, it ensures stable output power for enhanced process reproducibility. Its microsecond-level arc handling speed achieves highquality thin films and boosts productivity.

Product Introduction

Features & Benefits
  • Wide output range of up to 1200V / 50A / 20kW
  • Built-in ground noise suppression technology reduces equipment mutual interference
  • Leading industry efficiency of over 90%, demonstrating outstanding environmental and energy-saving performance
  • Microsecond-level arc management mechanism
  • Maximum continuous and adjustable ignition voltage of 1900V, suitable for low vacuum sputtering and special target applications
Applications

Plasma

PVD

Semi

Display

Industry