Pulsed DC Power Supply 10kW / 1000V

10kW Pulsed DC Power Supply

Delta's pulsed DC power supply is ideal for sputtering systems, validated in critical processes. Its leading ground noise suppression reduces mutual interference in complex systems. The pulse technology and arc mechanisms minimize arc damage in reactive sputtering, with a maximum ignition voltage of 1900V and a wide adjustable pulse frequency range, offering unmatched process flexibility.

Product Introduction

Features & Benefits
  • Wide adjustable pulse frequency range from 5kHz to 400kHz
  • Built-in ground noise suppression technology
  • Maximum continuous and adjustable ignition voltage of 1900V,
    suitable for low vacuum sputtering and special target applications
  • Wide output range of up to 1000V / 30A / 10kW
  • Leading industry efficiency of 90%, outstanding environmental
    and energy-saving performance
  • Rapid arc detection, arc energy control less than 200uJ/kW
Applications

Plasma

PVD

Semi

Display

Industry